AGV carts deliver incoming cassettes via belt conveyor to the cassette elevator mechanism. Wafers are conveyed through the wafer track to the pitch-changing mechanism. A robot picks wafers from the pitch-changing mechanism and places them into process-ready graphite boats, completing automatic loading. During unloading, the robot extracts wafers from processed graphite boats and returns them to the pitch-changing mechanism; wafers are then conveyed via tracks into cassettes for automatic unloading. Specially designed for tube PECVD processes, this equipment achieves precise conversion of wafers between cassettes and graphite boats, ensuring efficient and stable coating operation.
BC、TOPCon
Wafer Size: BC: 182×91–210×105mm(Half-cut); TOPCon:182–230mm (Full-cut);
Throughput: BC: 16000 pcs/h (Half-cut); TOPCon: 7500 pcs/h (Full-cut)
Breakage Rate：≤0.3%(excl. incoming)
Uptime: ≥99%
